Key Features:
• Precision Ion Beam Etching: Achieves uniform, low-damage surface modification, ideal for cross-sectioning, polishing, and thinning of hard and soft materials.
• Thin Film Deposition: Supports high-purity coating with metals or functional materials, ensuring uniform coverage and minimal contamination.
• Cryogenic and Ambient Operation: Compatible with low-temperature sample protection, preventing structural damage in sensitive materials.
• High Stability and Control: Offers fine beam control, automated rastering, and process monitoring for reproducible results.
• Integration Capabilities: Can be combined with cryo-transfer systems (e.g., LSCT series) for seamless workflow from sample preparation to electron microscopy.
Typical Applications:
• Materials Science: Surface and interface analysis, cross-sectional preparation of metals, ceramics, and composites.
• Semiconductor and Microelectronics: Chip failure analysis, FinFET cross-sectioning, and advanced packaging inspection.
• Life Sciences and Nanotechnology: Cryo-thinning of biological samples, preparation of nanoparticles, and delicate soft matter.
• Energy Materials: Examination of battery electrodes, fuel cell catalysts, and solid electrolyte interfaces.